With this focus, the book does not include examples from other important application areas like robotics, machining centres and vehicle mechatronics, though the theory is also applicable to those areas of mechatronics. The high-tech industrial background focuses on high-precision positioning at very high velocity and acceleration levels. The academic part is based on advanced research on precision motion systems, including ultra precision metrology equipment with fast Scanning-Probe Microscopy and optical measurement systems with sub-nanometre accuracy. The industry oriented part is based on extensive experience in designing the most sophisticated motion systems presently available, the stages of wafer scanners, which are used in the semiconductor industry. First of all it is a combination of a reference book for engineers working in the high-tech industry and a university textbook, due to the mixed industrial and academic background of the authors. This book distinguishes itself from other books in several ways. This proliferation of mechatronics has been described in many books, which each have been written with a different scope in mind depending on the specific technological anchor point of the author(s) within this wide multidisciplinary field of engineering. The complexity of mechatronic systems ranges from a simple set of electronic controlled relay-switches to highly integrated precision motion systems. After its origin around the second world war the name mechatronics has become known for all kind of mechanical systems where mechanics and electronics are combined to achieve a certain function. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.Ī world without mechatronics is almost as unthinkable as a world without electric light. Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He also teaches Mechatronics at the Eindhoven University of Technology. Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems.Īdrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems. Robert Munnig Schmidt is emeritus professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS.Īs well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella. Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives.
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